Title:
遮断弁を用いたパルスガス供給方法および装置
Document Type and Number:
Japanese Patent JP6916964
Kind Code:
B2
Abstract:
A fluid control system for pulse delivery of a fluid include a flow channel, an isolation valve to initiate and terminate a pulse of fluid from the flow channel, and a pulse mass flow controller (MFC). The MFC includes a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valve, to control a mass of fluid delivered during the pulse of fluid. Controlling the flow of fluid through the control valve can be based on feedback from the flow sensor during the pulse initiated and terminated by the isolation valve.
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Inventors:
Ding Junghwa
Labassi Michael
Hill Gordon
Labassi Michael
Hill Gordon
Application Number:
JP2020541648A
Publication Date:
August 11, 2021
Filing Date:
January 28, 2019
Export Citation:
Assignee:
MKS INSTRUMENTS,INCORPORATED
International Classes:
G05D7/06; G01F1/00
Domestic Patent References:
| JP2014514625A | ||||
| JP2010206217A | ||||
| JP11154022A | ||||
| JP11045122A | ||||
| JP2007058336A | ||||
| JP2011118654A |
Foreign References:
| US20140238498 | ||||
| WO2015138085A1 | ||||
| WO2003034169A1 | ||||
| US20040226507 |
Attorney, Agent or Firm:
Shuji Sugimoto
Kenro Tsutsumi
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko
Hiroki Taniguchi
Shinji Nakao
Takashi Sasanuma
Kenro Tsutsumi
Yuka Kobayashi
Kenichi Nakata
Daisuke Kaneko
Hiroki Taniguchi
Shinji Nakao
Takashi Sasanuma