Title:
流量制御装置
Document Type and Number:
Japanese Patent JP6923939
Kind Code:
B2
Abstract:
The flow controller according to the present invention includes: a control valve; a first flow passage provided on the downstream side of the control valve; a second flow passage; and an expansion chamber provided between the first flow passage and the second flow passage. The second flow passage is provided in a position that is not on the extension of the first flow passage.
More Like This:
Inventors:
Nobu Hirai
Kazuyuki Morisaki
Kaoru Hirata
Koji Nishino
Shinichi Ikeda
Kazuyuki Morisaki
Kaoru Hirata
Koji Nishino
Shinichi Ikeda
Application Number:
JP2018503086A
Publication Date:
August 25, 2021
Filing Date:
February 23, 2017
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
G05D7/06
Domestic Patent References:
| JP2013228950A | ||||
| JP2010218571A | ||||
| JP2011226513A |
Attorney, Agent or Firm:
Yata Ryuichi
Takeshi Sugimoto
Takeshi Sugimoto