Title:
可視スペクトルの波長のための誘電体メタサーフェス（ｍｅｔａｓｕｒｆａｃｅ）を製造するための原子層堆積プロセス
Document Type and Number:
Japanese Patent JP6925358
Kind Code:
B2
Abstract:
A method of fabricating a visible spectrum optical component includes: providing a substrate; forming a resist layer over a surface of the substrate; patterning the resist layer to form a patterned resist layer defining openings exposing portions of the surface of the substrate; performing deposition to form a dielectric film over the patterned resist layer and over the exposed portions of the surface of the substrate, wherein a top surface of the dielectric film is above a top surface of the patterned resist layer; removing a top portion of the dielectric film to expose the top surface of the patterned resist layer and top surfaces of dielectric units within the openings of the patterned resist layer; and removing the patterned resist layer to retain the dielectric units over the substrate.
Inventors:
Devlin Robert Sea.
Cola Saninejad Mohammad Reza
Capasso Federico
Park Hong Kun
High alexander arthur
Cola Saninejad Mohammad Reza
Capasso Federico
Park Hong Kun
High alexander arthur
Application Number:
JP2018546404A
Publication Date:
August 25, 2021
Filing Date:
November 23, 2016
Export Citation:
Assignee:
President and Fellows of Harvard College
International Classes:
G02B1/02
Domestic Patent References:
| JP2008046428A | ||||
| JP2004302457A | ||||
| JP2010085977A | ||||
| JP2015502581A | ||||
| JP2005017408A | ||||
| JP2008299084A |
Foreign References:
| US20140210835 | ||||
| US20060127829 | ||||
| US20150068599 | ||||
| WO2015160412A2 |
Attorney, Agent or Firm:
Hatsushi Shimizu
Masao Haruna
Hirotaka Yamaguchi
Toshi Gobe
Ryuichi Inoue
Toshimitsu Sato
Koichi Niimi
Tomohiko Kobayashi
Hideki Kodera
Masato Ozeki
Kazuya Kawamoto
Masao Haruna
Hirotaka Yamaguchi
Toshi Gobe
Ryuichi Inoue
Toshimitsu Sato
Koichi Niimi
Tomohiko Kobayashi
Hideki Kodera
Masato Ozeki
Kazuya Kawamoto