Title:
真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト
Document Type and Number:
Japanese Patent JP6948147
Kind Code:
B2
Abstract:
To realize a vacuum pump, the overall height of which can be reduced, and a magnetic bearing portion and a shaft that are provided in the vacuum pump. In the present embodiment, the lower Ra sensor target, the fourth spacer, and the Ra electromagnetic target are configured in this order, from the inlet port side toward the outlet port side, at the lower side of the shaft of the 5-axis control magnetic bearing. Likewise, at the lower side of the stator, the lower Ra sensor and the lower Ra electromagnet are configured in this order, from the inlet port toward the outlet port. In other words, the lower Ra sensor is disposed above the lower Ra electromagnet. According to this configuration, the third spacer fixed above the lower Ra sensor target can be shortened, thereby reducing the length of the shaft. As a result, the height of the 5-axis control magnetic bearing and the length of the stator column enclosing electrical components constituting the 5-axis control magnetic bearing can be reduced, thereby reducing the overall height of the vacuum pump.
Inventors:
Tokinaga Wei
Toru Miwada
Yuyuki Sakaguchi
Toru Miwada
Yuyuki Sakaguchi
Application Number:
JP2017081992A
Publication Date:
October 13, 2021
Filing Date:
April 18, 2017
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F16C32/04
Domestic Patent References:
| JP2000283160A | ||||
| JP2002242876A | ||||
| JP4014815U | ||||
| JP58079695A |
Attorney, Agent or Firm:
Hitoshi Nakano
Takashi Kawai
Takashi Kawai