Title:
クライオポンプ及びクライオポンプ制御方法
Document Type and Number:
Japanese Patent JP6952168
Kind Code:
B2
Abstract:
To extend the life of a cryopump to some extent.SOLUTION: A cryopump 10 comprises a first stage cryopanel 18, a second stage cryopanel 19, a refrigerator 16 thermally connected to the first stage cryopanel 18 and the second stage cryopanel 19 to cool the first stage cryopanel 18 to a first stage cooling temperature and cool the second stage cryopanel 19 to a second stage cooling temperature lower than the first stage cooling temperature, and a control device 100 constituted so as to execute first stage temperature control to control the first stage cooling temperature to a first stage target temperature. The control device 100 is constituted so as to detect an increase in the second stage cooling temperature during execution of the first stage temperature control and increase refrigerating capacity of the refrigerator 16.SELECTED DRAWING: Figure 1
Inventors:
Takahashi Run
Application Number:
JP2020118985A
Publication Date:
October 20, 2021
Filing Date:
July 10, 2020
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/16; F04B37/08; F04B49/10
Domestic Patent References:
| JP4912438B2 | ||||
| JP2014156831A | ||||
| JP2004027866A |
Attorney, Agent or Firm:
Sakaki Morishita
Tomisho Teruo
Tomisho Teruo