Title:
基板収納容器
Document Type and Number:
Japanese Patent JP6953661
Kind Code:
B2
Abstract:
A substrate storage container comprises a container body capable of containing a plurality of substrates, and an air supply member capable of supplying gas from outside of the container body to an internal space, wherein for the substrate storage container the container body is formed in a front open box and the air supply member is attached to the bottom surface, and wherein a functional unit that changes the environment of the internal space to different states are connected with the air supply member so as to be able to be exchanged.
Inventors:
Ogawa Tsutomu
Kotoku Tominaga
Kotoku Tominaga
Application Number:
JP2019508740A
Publication Date:
October 27, 2021
Filing Date:
February 15, 2018
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
B65D85/30; H01L21/673
Domestic Patent References:
| JP2011181930A | ||||
| JP2014160783A | ||||
| JP2016538732A |
Foreign References:
| WO2016013536A1 | ||||
| WO2016135952A1 | ||||
| WO2016089912A1 |
Attorney, Agent or Firm:
Tomohiro Sakamoto