金属・誘電体・金属の３層構造を有する光変調構造体、その製造方法及び用途

Title:

金属・誘電体・金属の３層構造を有する光変調構造体、その製造方法及び用途

Document Type and Number:

Japanese Patent JP7191375

Kind Code:

B2

Abstract:

To provide a light meta-material (light modulation structure) having a three-layered structure of a conductor, a dielectric, and a conductor, the meta-material being highly sensitive to the thickness (gap) of the dielectric layer and being applicable to a pressure sensor or a displacement sensor, for example.SOLUTION: There are provided a light modulation structure in which a conductor layer (first conductor layer) on a first substrate faces a conductor layer (second conductor layer) on a second substrate across a dielectric layer and the thickness of the dielectric layer is changed by an external force, a method for manufacturing the light modulation structure, and a device using the light modulation structure.SELECTED DRAWING: Figure 1

Inventors:

Yoshiaki Kanamori
Kanehiro Hane

Application Number:

JP2018234473A

Publication Date:

December 19, 2022

Filing Date:

December 14, 2018

Export Citation:

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