Title:
離型安定性を向上させるインプリント方法及び関連するインプリントシステム
Document Type and Number:
Japanese Patent JP7193177
Kind Code:
B2
Abstract:
The present invention provides an imprint method comprises: adding a soluble material to a master mold; solidifying the soluble material to form a soluble mold, the soluble mold having a mold pattern; forming an adhesive agent on a side of the soluble mold opposite to the master mold; placing a taking device to the adhesive agent, wherein the taking device comprises: a frame and a support plate positioned on the frame, and the support plate is contacted with the adhesive agent; removing the taking device from the master mold, wherein the soluble mold is associated with the taking device as the taking device is removed; placing the soluble mold on a polymer layer; applying a high temperature and a pressure to the soluble mold to make the polymer layer have an imprint pattern corresponding to the mold patter and solidify the polymer layer; and providing a solvent to dissolve the soluble mold to separate the solidified polymer layer and the support plate to form an imprint workpiece having the imprint pattern.
Inventors:
蔡 嵩▲文▼
Application Number:
JP2021195033A
Publication Date:
December 20, 2022
Filing Date:
December 01, 2021
Export Citation:
Assignee:
EVER RADIANT INCORPORATION
International Classes:
B29C59/02; B29C33/52
Domestic Patent References:
| JP2014139007A | ||||
| JP2005539396A |
Foreign References:
| WO2019112521A1 | ||||
| WO2012086385A1 |
Attorney, Agent or Firm:
Arima Momoko
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