Title:
保持装置
Document Type and Number:
Japanese Patent JP7213656
Kind Code:
B2
Abstract:
To improve the accuracy of measurement of temperature of the first surface of a plate member measured by a temperature measuring resistor.SOLUTION: A holding device comprises a plate member having a first surface that is substantially orthogonal to a first direction, a heat generating resistor arranged inside the plate member, and a temperature measuring resistor arranged inside the plate member. The holding device holds an object on the first surface of the plate member. The temperature measuring resistor is arranged in a position on the more first surface side than the heat generating resistor in the first direction.SELECTED DRAWING: Figure 2
Inventors:
Kazutaka Tanaka
Takahisa Komatsu
Masao Tsuji and others
Takahisa Komatsu
Masao Tsuji and others
Application Number:
JP2018207882A
Publication Date:
January 27, 2023
Filing Date:
November 05, 2018
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/31; C23C14/50; C23C16/46; H01L21/3065; H01L21/683
Domestic Patent References:
| JP2015514661A | ||||
| JP2011145240A |
Attorney, Agent or Firm:
Patent Business Corporation Alpha International Patent Office