Title:
多層構造体の層間のオーバレイを測定する技法
Document Type and Number:
Japanese Patent JP7265592
Kind Code:
B2
Abstract:
A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.
Inventors:
Rasoa Danangjai Singh
Weinberg Yakov
schwartz band ishai
Chris Roman
Sauer Itai
goldman run
Novak Olga
Adan offer
Levis Simon
Weinberg Yakov
schwartz band ishai
Chris Roman
Sauer Itai
goldman run
Novak Olga
Adan offer
Levis Simon
Application Number:
JP2021130578A
Publication Date:
April 26, 2023
Filing Date:
August 10, 2021
Export Citation:
Assignee:
Applied Materials Israel Limited
International Classes:
G06T7/30; H01L21/66
Domestic Patent References:
| JP2008058166A | ||||
| JP2005518107A | ||||
| JP2000171230A | ||||
| JP2012177961A |
Attorney, Agent or Firm:
Shinichiro Tanaka
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Nobuhiko Suzuki
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Nobuhiko Suzuki
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