Title:
分離装置及び分離方法
Document Type and Number:
Japanese Patent JP7308265
Kind Code:
B2
Abstract:
A separating apparatus configured to separate a processing target object into a first separation body and a second separation body includes a first holder configured to hold the first separation body; a second holder configured to hold the second separation body; a moving unit configured to move the first holder and the second holder relatively to each other; and a rotation unit configured to rotate at least one of the first separation body or the second separation body to allow a separation surface of the first separation body or a separation surface of the second separation body to face upwards.
Inventors:
Seiji Nakano
Yohei Yamawaki
Yoshihiro Kawaguchi
Yohei Yamawaki
Yoshihiro Kawaguchi
Application Number:
JP2021530612A
Publication Date:
July 13, 2023
Filing Date:
June 29, 2020
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; H01L21/02
Foreign References:
| WO2019044530A1 | ||||
| WO2013058129A1 | ||||
| WO2012176629A1 | ||||
| WO2013136982A1 |
Attorney, Agent or Firm:
Tetsuo Kanemoto
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine