Title:
型を製造する方法、型、インプリント方法、インプリント装置及び物品の製造方法
Document Type and Number:
Japanese Patent JP7336373
Kind Code:
B2
Abstract:
The present invention provides a method of manufacturing a mold including performing a process of processing a surface of a base member so that a mark region where a mark is to be formed on the surface, which is to be a pattern surface of the mold, will be recessed lower than a pattern region, and performing a process of a second process of arranging, on the mark region which has been recessed, a mark member made of a material which has an optical physical property different from an optical physical property of the mold and a protection layer configured to cover the mark member so that a difference between a height of a surface of the mark and a height of a surface of the pattern will fall within a predetermined range.
Inventors:
Koji Sato
Application Number:
JP2019223000A
Publication Date:
August 31, 2023
Filing Date:
December 10, 2019
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C33/38; B29C59/04
Domestic Patent References:
| JP2007140460A | ||||
| JP2013519236A | ||||
| JP2014011254A | ||||
| JP2013030522A | ||||
| JP2010245094A | ||||
| JP2013197198A |
Attorney, Agent or Firm:
Patent Attorney Corporation Otsuka International Patent Office