Title:
温調ユニット
Document Type and Number:
Japanese Patent JP7360458
Kind Code:
B2
Abstract:
A temperature control unit has a temperature control unit body, a temperature control part provided inside the temperature control unit body, which raises and lowers a surface temperature of the temperature control unit body on a side where a temperature control object is located, and a thin coating temperature measuring resistance part composed of a thermal sprayed coating. The thin coating temperature measuring resistance part is formed over a certain range in a surface on the side where the temperature control object is located, and which is provided inside the temperature control unit body on a side closer to the temperature control object than the temperature control part. The thin coating temperature measuring resistance part can accurately measure an average temperature of a temperature control surface.
Inventors:
Ryutaro Kawamura
Kenyoshi Taguchi
Kenyoshi Taguchi
Application Number:
JP2021520791A
Publication Date:
October 12, 2023
Filing Date:
May 19, 2020
Export Citation:
Assignee:
Tocalo Co., Ltd.
International Classes:
G01K7/18; H01L21/683
Domestic Patent References:
| JP2015513178A | ||||
| JP200788411A |
Attorney, Agent or Firm:
Katsumi Iseki
Shuhei Kaneko
Wataru Ohnishi
Shuhei Kaneko
Wataru Ohnishi