Title:
シート剥離方法およびシート剥離装置
Document Type and Number:
Japanese Patent JP7421950
Kind Code:
B2
Abstract:
A sheet peeling method, which is a method of peeling an adhesive sheet (AS) from an integrated object (UP) made by attaching an object to be attached (CP) to the corresponding adhesive sheet (AS), includes: a sheet contact process of bringing a culminating point (12C) of a plurality of convex parts (12A) related with a sheet contact means (10) having a convex part formation surface (12B), on which the plurality of convex parts (12A) are formed, into contact with the adhesive sheet (AS) related with the integrated object (UP); an object-to-be-attached support process of supporting the object to be attached (CP), related with the integrated object (UP), through an object-to-be-attached support means (20), and inserting the integrated object (UP) between the adhesive sheet (AS) and the culminating point (12C) of the plurality of convex parts (12A) through the sheet contact means (10) bringing the culminating point into contact with the adhesive sheet; and a sheet pulling process of pulling the adhesive sheet (AS) related with the integrated object (UP) inserted therebetween, toward the convex part formation surface (12B).
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Inventors:
Tadatomo Yamada
Toshiaki Mao
Ken Takano
Masanori Maruyama
Toshiaki Mao
Ken Takano
Masanori Maruyama
Application Number:
JP2020029159A
Publication Date:
January 25, 2024
Filing Date:
February 25, 2020
Export Citation:
Assignee:
Lintec Corporation
International Classes:
H01L21/683
Domestic Patent References:
| JP2014011416A | ||||
| JP2017005222A | ||||
| JP2006319150A | ||||
| JP2013191781A |
Attorney, Agent or Firm:
Patent Attorney Corporation Kinoshita Intellectual Property Office