Title:
基板収納容器
Document Type and Number:
Japanese Patent JP7453822
Kind Code:
B2
Abstract:
To provide a substrate housing container capable of suppressing floating and vibration of the substrate housing container when detaching and attaching a nozzle of an outer device or the like.SOLUTION: A substrate housing container 1 housing a substrate W, comprises: a container body 10 housing the substrate W via an opening H; a lid body 20 closing the opening H of the container body 10; and bulb bodies 30 and 40 controlling a flow of gas to the container body 10 or from the container body 10. In the substrate housing container 1, the bulb bodies 30 and 40 contain: a bulb body 31 formed with an air hole h to which the gas is communicated; a bulb holding part 32 holding the bulb body 31 and having connection parts 321j and 322j connected to the container body 10; and a flexible connection member 33 arranged between the bulb body 31 and the bulb holding part 32 and in contact with the bulb body 31 and the bulb holding part 32.SELECTED DRAWING: Figure 7
Inventors:
Kazumasa Onuki
Application Number:
JP2020048688A
Publication Date:
March 21, 2024
Filing Date:
March 19, 2020
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
H01L21/673
Domestic Patent References:
| JP2016503586A |
Attorney, Agent or Firm:
Patent Attorney Corporation Sakamoto International Patent and Trademark Office