Title:
固体撮像素子
Document Type and Number:
Japanese Patent JP7454592
Kind Code:
B2
Abstract:
Provided is a solid-state imaging element including a support 1 having a photoelectric conversion unit 10 and an optical filter 20 provided on a light incident side with respect to the photoelectric conversion unit 10. The optical filter 20 has two or more kinds of pixels 21, 22, and 23 arranged in a patterned manner and a partition wall 25 disposed between the pixels. A refractive index of the partition wall with respect to light having a wavelength of 533 nm is 1.10 to 1.30, a width W1 of the partition wall is 80 to 150 nm, a refractive index of the pixels with respect to light having a wavelength of 1000 nm is 1.60 to 1.90, a difference between a thickness H1 of the partition wall and a thickness H2 of pixels adjacent to the partition wall is 200 nm or less, and a difference between the refractive index of the partition wall with respect to light having a wavelength of 533 nm and a refractive index of the pixels adjacent to the partition wall with respect to light having a wavelength of 1000 nm is 0.30 to 0.80.
Inventors:
Masahiro Mori
Application Number:
JP2021561324A
Publication Date:
March 22, 2024
Filing Date:
November 17, 2020
Export Citation:
Assignee:
Fujifilm Corporation
International Classes:
H01L27/146; G02B5/20; G02B5/22
Foreign References:
| WO2018174147A1 | ||||
| WO2019039172A1 | ||||
| WO2016114362A1 | ||||
| WO2018194069A1 |
Attorney, Agent or Firm:
Sykes Patent Attorney Corporation