Document Type and Number:
Japanese Patent JPH0125618
Kind Code:
B2
Inventors:
KURAMOTO KENJI
OOMORI YOJI
SHIMOGOORI MAKOTO
HIROSHIGE KATSUNOBU
OOMORI YOJI
SHIMOGOORI MAKOTO
HIROSHIGE KATSUNOBU
Application Number:
JP10471280A
Publication Date:
May 18, 1989
Filing Date:
July 30, 1980
Export Citation:
Assignee:
EBARA MFG
International Classes:
G01N21/84; B01J47/14; B01J49/00
Next Patent: JPH0125619