Document Type and Number:
Japanese Patent JPH0135403
Kind Code:
Y2
Application Number:
JP14882781U
Publication Date:
October 27, 1989
Filing Date:
October 08, 1981
Export Citation:
International Classes:
H01J7/26; G01N27/06; (IPC1-7): H01J7/26
Next Patent: JPH0135404