Document Type and Number:
Japanese Patent JPH02128151
Kind Code:
U
Application Number:
JP3780089U
Publication Date:
October 23, 1990
Filing Date:
March 31, 1989
Export Citation:
International Classes:
G03F1/00; G03F1/42; H01L21/027; H01L21/30; (IPC1-7): G03F1/00; H01L21/30; G03F1/08; H01L21/027