Document Type and Number:
Japanese Patent JPH02139804
Kind Code:
U
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Application Number:
JP4937989U
Publication Date:
November 22, 1990
Filing Date:
April 26, 1989
Export Citation:
International Classes:
B65G1/04; B65G1/00; B65G1/02; B65G1/14; B66F9/07; H01L21/67; H01L21/68; (IPC1-7): B65G1/04; B65G1/14; B66F9/07; H01L21/68