Title:
【発明の名称】改良形希ガス‐ハロゲンエキシマレーザ
Document Type and Number:
Japanese Patent JPH02500944
Kind Code:
A
Abstract:
A rare gas-halogen excimer laser in which the laser gases are exposed virtually only to metal and ceramic, thereby reducing contamination of the gases and optics. In one preferred embodiment magnetic fluid seals (56) are used to isolate the bearings (58) supporting the shaft (46) upon which the tangential fan (44) rotates so that the lubricated bearings do not contaminate the laser gases. The fan (44) uses magnetic coupling (70, 76) so that an isolating enclosure may be placed over the seal to prevent the leakage of gases into the environment should the seal fail. An excimer laser that is therefore both safe enough to be used in medical and industrial applications as well as reliable may be fabricated.
More Like This:
| JPH0193186 | ION LASER DEVICE |
Inventors:
Revatter Jeffrey Eye
Application Number:
JP50848188A
Publication Date:
March 29, 1990
Filing Date:
August 30, 1988
Export Citation:
Assignee:
Accurais Incorporated
International Classes:
H01S3/03; H01S3/036; H01S3/038; H01S3/097; H01S3/225; (IPC1-7): H01S3/03; H01S3/038; H01S3/097
Domestic Patent References:
| JPS59227183A | 1984-12-20 | |||
| JPS582498A | 1983-01-08 | |||
| JPS5788789A | 1982-06-02 | |||
| JPS5042797A | 1975-04-18 | |||
| JPS59152680A | 1984-08-31 | |||
| JPS62156887A | 1987-07-11 | |||
| JPS61203689A | 1986-09-09 |
Foreign References:
| US4611327A | 1986-09-09 |
Attorney, Agent or Firm:
Minoru Nakamura (7 outside)