Title:
【発明の名称】分子真空ポンプ
Document Type and Number:
Japanese Patent JPH02502840
Kind Code:
A
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Inventors:
Shorokh Valery Volisovich
Demihoff Konstantin Evgenievich
Viffref Vladimir Ilyich
Sergeev Vladimir Pavlovich
Sharshin Sergey Nikolaevich
Demihoff Konstantin Evgenievich
Viffref Vladimir Ilyich
Sergeev Vladimir Pavlovich
Sharshin Sergey Nikolaevich
Application Number:
JP50174188A
Publication Date:
September 06, 1990
Filing Date:
January 05, 1988
Export Citation:
Assignee:
Shorokh Valery Volisovich
Demihoff Konstantin Evgenievich
Viffref Vladimir Ilyich
Sergeev Vladimir Pavlovich
Sharshin Sergey Nikolaevich
Demihoff Konstantin Evgenievich
Viffref Vladimir Ilyich
Sergeev Vladimir Pavlovich
Sharshin Sergey Nikolaevich
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Attorney, Agent or Firm:
Masahiko Takeda (2 outside)
Previous Patent: JPH02502839
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