Document Type and Number:
Japanese Patent JPH03113851
Kind Code:
U
Application Number:
JP2328990U
Publication Date:
November 21, 1991
Filing Date:
March 08, 1990
Export Citation:
International Classes:
H01L21/8247; H01L23/50; H01L29/78; H01L29/788; H01L29/792; (IPC1-7): H01L23/50; H01L29/78; H01L29/788; H01L29/792
Domestic Patent References:
| JPH0186247U | 1989-06-07 | |||
| JPS6278761U | 1987-05-20 | |||
| JPS63147831U | 1988-09-29 |