- Patent JPH03120568

Document Type and Number:

Japanese Patent JPH03120568

Kind Code:

U

Application Number:

JP2977990U

Publication Date:

December 11, 1991

Filing Date:

March 23, 1990

Export Citation:

International Classes:

C30B15/00; C30B29/42; H01L21/208; (IPC1-7): C30B15/00; C30B29/42; H01L21/208

Domestic Patent References:

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