Document Type and Number:
Japanese Patent JPH03128663
Kind Code:
U
Application Number:
JP3807890U
Publication Date:
December 25, 1991
Filing Date:
April 11, 1990
Export Citation:
International Classes:
C23F13/00; C23F13/18; C23F13/22; (IPC1-7): C23F13/22; C23F13/00; C23F13/18
Domestic Patent References:
JPS55142575U | 1980-10-13 | |||
JPS5619569U | 1981-02-20 | |||
JPS5796970U | 1982-06-15 | |||
JPS606433U | 1985-01-17 |