Document Type and Number:
Japanese Patent JPH031822
Kind Code:
B2
Inventors:
MAEJIMA TARO
ENDO ATSUSHI
HIROSE ETSUKO
TABUCHI TAKESHI
TSUKAO RYUSAKU
ENDO ATSUSHI
HIROSE ETSUKO
TABUCHI TAKESHI
TSUKAO RYUSAKU
Application Number:
JP23476784A
Publication Date:
January 11, 1991
Filing Date:
November 05, 1984
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/027; G03F7/20; G03F7/26; H01L21/30; H01L21/3205
Next Patent: JPH031823