Document Type and Number:
Japanese Patent JPH0346975
Kind Code:
B2
Inventors:
RORUFU AA KUREMERUSU
Application Number:
JP22174886A
Publication Date:
July 17, 1991
Filing Date:
September 19, 1986
Export Citation:
Assignee:
BORUKU INSUTORUMENTSU GMBH
International Classes:
H01L23/50; G02F1/13; H01L21/60; H05K3/32