Title:
【考案の名称】RF発生装置のインピーダンスマツチング制御回路
Document Type and Number:
Japanese Patent JPH04105714
Kind Code:
U
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Inventors:
Shuichi Fushiya
Shimizu Hiroumi
Shimizu Hiroumi
Application Number:
JP2900491U
Publication Date:
September 11, 1992
Filing Date:
January 29, 1991
Export Citation:
International Classes:
G05F1/00; H01P5/02; H03H7/40; (IPC1-7): H03H7/40; G05F1/00; H01P5/02
Domestic Patent References:
| JPS63279609A | 1988-11-16 | |||
| JPS61139111A | 1986-06-26 |