Title:
【考案の名称】混成集積回路装置
Document Type and Number:
Japanese Patent JPH04107841
Kind Code:
U
Inventors:
Mamoru Ando
Application Number:
JP977891U
Publication Date:
September 17, 1992
Filing Date:
February 27, 1991
Export Citation:
International Classes:
H01L23/13; H01L23/12; (IPC1-7): H01L23/12; H01L23/12; H01L23/13