Document Type and Number:
Japanese Patent JPH0442913
Kind Code:
Y2
Application Number:
JP18080084U
Publication Date:
October 12, 1992
Filing Date:
November 30, 1984
Export Citation:
International Classes:
F16K11/22; F16K27/02; F16L37/00; F16L39/04; H01L21/302; H01L21/3065; (IPC1-7): H01L21/302; F16L39/04
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