Document Type and Number:
Japanese Patent JPH045018
Kind Code:
Y2
Application Number:
JP8217283U
Publication Date:
February 13, 1992
Filing Date:
May 31, 1983
Export Citation:
International Classes:
G01R15/12; G01N13/02; G01R13/02; G01R31/28; (IPC1-7): G01R15/12
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