Document Type and Number:
Japanese Patent JPH0471173
Kind Code:
B2
Inventors:
WADA KUNIO
Application Number:
JP16093983A
Publication Date:
November 13, 1992
Filing Date:
August 31, 1983
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01N3/08; G05B11/06; G05B13/00; G05B21/02