Document Type and Number:
Japanese Patent JPH047531
Kind Code:
B2
Inventors:
KOBAYASHI HIDE
ABE KATSUO
SAKATA MASAO
KASAHARA OSAMU
OOGISHI HIDEJI
ABE KATSUO
SAKATA MASAO
KASAHARA OSAMU
OOGISHI HIDEJI
Application Number:
JP23988483A
Publication Date:
February 12, 1992
Filing Date:
December 21, 1983
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J23/027; C23C14/35; H01J23/00; H01J25/50; H01J37/34
Next Patent: JPH047532