Document Type and Number:
Japanese Patent JPH0567881
Kind Code:
B2
Inventors:
ISHIKAWA HIROTOSHI
Application Number:
JP31680787A
Publication Date:
September 27, 1993
Filing Date:
December 15, 1987
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01B13/06; (IPC1-7): G01B13/06
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