Document Type and Number:
Japanese Patent JPH0567953
Kind Code:
B2
Inventors:
SUKEGAWA OSAMU
Application Number:
JP5571887A
Publication Date:
September 27, 1993
Filing Date:
March 10, 1987
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
G09F9/30; G02F1/133; G02F1/1345; G02F1/136; G02F1/1368; G09G3/36; H01L27/12; H01L29/78; H01L29/786; (IPC1-7): G09F9/30; G02F1/133
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