Document Type and Number:
Japanese Patent JPH0578135
Kind Code:
B2
Inventors:
EZAWA MASAYOSHI
WAKANA SHIGERU
MISUMI AKIRA
ASANO TETSUO
UEDA TOSHIO
WAKANA SHIGERU
MISUMI AKIRA
ASANO TETSUO
UEDA TOSHIO
Application Number:
JP1991584A
Publication Date:
October 28, 1993
Filing Date:
February 08, 1984
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J7/24; H01J29/00; H01J31/10; (IPC1-7): H01J31/10; H01J7/24
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