【発明の名称】フオトマスクブランクとフオトマスク

Title:

【発明の名称】フオトマスクブランクとフオトマスク

Document Type and Number:

Japanese Patent JPH0616170

Kind Code:

B2

More Like This:

JPS61156257	IMPLEMENTING DEVICE OF ORIGINAL ANGLE STICKING GAUGE FOR SCANNER
JP2006093436	EXPOSURE MASK AND FORMATION METHOD OF PHOTORESIST PATTERN

Inventors:

USHIDA MASAO

Application Number:

JP17636186A

Publication Date:

March 02, 1994

Filing Date:

July 25, 1986

Export Citation:

Assignee:

HOYA CORP

International Classes:

G03F1/00; G03F1/46; G03F1/50; H01L21/027; (IPC1-7): G03F1/14

Domestic Patent References:

JP5193875A
JP55121441A

Next Patent: ENGINE SUPPORT STRUCTURE OF MOTORCYCLE