Title:
【考案の名称】真空蒸着装置
Document Type and Number:
Japanese Patent JPH0622364
Kind Code:
U
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Inventors:
Nakagawara Hitoshi
Application Number:
JP6433092U
Publication Date:
March 22, 1994
Filing Date:
August 21, 1992
Export Citation:
Assignee:
Nichiden Anelva Co., Ltd.
International Classes:
C23C14/24; (IPC1-7): C23C14/24
Attorney, Agent or Firm:
Suzuki Seiji
Next Patent: 真空蒸着装置