Title:
【発明の名称】半導体気相成長装置
Document Type and Number:
Japanese Patent JPH0687463
Kind Code:
B2
Abstract:
A reaction tube is fastened to a base plate by a plurality of bolts. A hollow shaft is secured to the base plate by a bearing interposed therebetween, and to be rotated by a motor. A casing secured to the shaft is arranged in the reaction tube, and has an opening closed by a susceptor on which a semiconductor substrate is to be placed. A heat-generating resistor is arranged in the casing. A thermocouple detects the temperature of the substrate. A temperature control circuit controls the temperature of the resistor by the output of the thermocouple.
Inventors:
Mitsuo Sato
Application Number:
JP21784589A
Publication Date:
November 02, 1994
Filing Date:
August 24, 1989
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/205; C23C16/458; C23C16/46; (IPC1-7): H01L21/205
Domestic Patent References:
| JP63204717A | ||||
| JP1145806A |
Attorney, Agent or Firm:
Norio Ogo
Next Patent: 建設機械の上部旋回体