Title:
【発明の名称】シリコンウエハの洗浄方法
Document Type and Number:
Japanese Patent JPH0691061
Kind Code:
B2
Inventors:
Susumu Otsuka
Tadashi Saki
Shuhei Sohei
Tadashi Saki
Shuhei Sohei
Application Number:
JP16843590A
Publication Date:
November 14, 1994
Filing Date:
June 28, 1990
Export Citation:
Assignee:
Nippon Steel Corporation
Nittetsu Electronics Co., Ltd.
Nittetsu Electronics Co., Ltd.
International Classes:
C30B33/00; H01L21/304; (IPC1-7): H01L21/304; C30B33/00
Domestic Patent References:
| JP6477130A | ||||
| JP56112747A |
Attorney, Agent or Firm:
Inoue Masao
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