Title:
【考案の名称】研磨装置排出液の排出先切替え装置
Document Type and Number:
Japanese Patent JPH0727751
Kind Code:
U
Inventors:
Tatsuya Mitsunaga
Application Number:
JP6387293U
Publication Date:
May 23, 1995
Filing Date:
October 23, 1993
Export Citation:
Assignee:
Mitsunaga Sangyo Co., Ltd.
International Classes:
B24B55/02; B24B57/00; (IPC1-7): B24B55/02
Attorney, Agent or Firm:
Tadashi Terada (1 person outside)
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