Title:
【考案の名称】真空処理炉の搬送装置
Document Type and Number:
Japanese Patent JPH07435
Kind Code:
Y2
Inventors:
Yoshiyuki Mitsuhashi
Application Number:
JP13172688U
Publication Date:
January 11, 1995
Filing Date:
October 11, 1988
Export Citation:
Assignee:
Asahi Glass Co., Ltd.
International Classes:
B65G54/02; B65G21/20; B65G49/00; B65G49/06; H01L21/677; H01L21/68; (IPC1-7): B65G49/00; B65G21/20; B65G54/02; H01L21/68
Domestic Patent References:
| JP63185712A | ||||
| JP6344603U | ||||
| JP5632413Y2 |
Attorney, Agent or Firm:
Masahiro Koizumi (3 others)