Title:
【発明の名称】光電式変位検出装置
Document Type and Number:
Japanese Patent JPH081365
Kind Code:
B2
Inventors:
Hideo Sakata
Hideo Usuda
Naoyoshi Terao
Hideo Usuda
Naoyoshi Terao
Application Number:
JP9596990A
Publication Date:
January 10, 1996
Filing Date:
April 11, 1990
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/00; (IPC1-7): G01B11/00
Domestic Patent References:
| JP61147910U | ||||
| JP57101980U | ||||
| JP635404U | ||||
| JP59182410U |
Attorney, Agent or Firm:
Shinzo Kinoshita (1 person outside)
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