【発明の名称】機能性堆積膜の製造法

Title:

【発明の名称】機能性堆積膜の製造法

Document Type and Number:

Japanese Patent JPH0821541

Kind Code:

B2

Inventors:

Hirooka Masaaki
Shigeru Ono
Shun Oda
Shimizu Isamu

Application Number:

JP28710185A

Publication Date:

March 04, 1996

Filing Date:

December 20, 1985

Export Citation:

Assignee:

Canon Inc

International Classes:

H01L31/04; H01L21/205; H01L21/285; (IPC1-7): H01L21/205; H01L31/04

Attorney, Agent or Firm:

Marushima Giichi

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