Title:
【発明の名称】露光装置におけるフィルムの加圧装置
Document Type and Number:
Japanese Patent JPH0822571
Kind Code:
B2
Inventors:
Minoru Tanaka
Nagai Akira
Nagai Akira
Application Number:
JP35022692A
Publication Date:
March 06, 1996
Filing Date:
December 04, 1992
Export Citation:
Assignee:
Adtech Engineering Co., Ltd.
Canon Components Inc.
Canon Components Inc.
International Classes:
B29C63/02; G03F7/20; B29L9/00; (IPC1-7): B29C63/02
Domestic Patent References:
| JP3184828A | ||||
| JP63239000A |
Attorney, Agent or Firm:
Kiyoshi Takahashi
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