Title:
【発明の名称】液体源からの化学蒸気のための統合された運搬システムにおける改良されたモジュール
Document Type and Number:
Japanese Patent JPH09510260
Kind Code:
A
Abstract:
An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.
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Inventors:
Star fur, craig em
Application Number:
JP52367795A
Publication Date:
October 14, 1997
Filing Date:
March 08, 1995
Export Citation:
Assignee:
Star fur, craig em
International Classes:
C23C16/44; C23C16/448; F22B1/28; H01L21/205; H01L21/31; (IPC1-7): C23C16/44; H01L21/205; H01L21/31
Attorney, Agent or Firm:
Fukami Hisaro (3 outside)
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