Title:
【発明の名称】薄層複合一形態強誘電ドライバー及びセンサー
Document Type and Number:
Japanese Patent JPH11503272
Kind Code:
A
Abstract:
A method for forming ferroelectric wafers (10) is provided. A prestress layer (14) is placed on the desired mold. A ferroelectric wafer (12) is placed on top of the prestress layer. The layers are heated and then cooled, causing the ferroelectric wafer to become prestressed. The prestress layer may include reinforcing material and the ferroelectric wafer may include electrodes or electrode layers may be placed on either side of the ferroelectric layer. Wafers produced using this method have greatly improved output motion.
Inventors:
Helbalm, Richard, F.
Bryant, Robert, Gee.
Fox, Robert, Elle.
Jalink, Antony, Junior.
Rollback, Wayne, W.
Simpson, Joyserine, Oh.
Bryant, Robert, Gee.
Fox, Robert, Elle.
Jalink, Antony, Junior.
Rollback, Wayne, W.
Simpson, Joyserine, Oh.
Application Number:
JP53051596A
Publication Date:
March 23, 1999
Filing Date:
April 04, 1996
Export Citation:
Assignee:
NASA (US)
International Classes:
G01L1/16; B32B37/14; H01L41/09; H01L41/22; H01L41/313; H01L41/333; (IPC1-7): H01L41/09; G01L1/16; H01L41/22
Attorney, Agent or Firm:
Yukio Ono (1 person outside)