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Document Type and Number:
Japanese Patent JPS4321660
Kind Code:
Y1
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Application Number:
JP8628365U
Publication Date:
September 11, 1968
Filing Date:
October 25, 1965
Export Citation:
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International Classes:
H01L21/60; H01L23/12; H01L23/48; (IPC1-7): H01L23/12; H01L21/60; H01L23/48



 
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