Document Type and Number:
Japanese Patent JPS4851254
Kind Code:
U
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Application Number:
JP9455871U
Publication Date:
July 04, 1973
Filing Date:
October 15, 1971
Export Citation:
International Classes:
C23C16/44; H01L21/22; H01L21/223; H01L21/329; (IPC1-7): H01L21/22; C23C9/00; C23C11/00