Document Type and Number:
Japanese Patent JPS4855684
Kind Code:
A
More Like This:
Application Number:
JP8977671A
Publication Date:
August 04, 1973
Filing Date:
November 12, 1971
Export Citation:
International Classes:
H01J9/233; H01L31/10; (IPC1-7): H01L31/10
Domestic Patent References:
| JPS4722897A |